BibTeX record journals/corr/abs-0802-3040

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@article{DBLP:journals/corr/abs-0802-3040,
  author       = {Daniel Grogg and
                  Nicoleta Diana Badila{-}Ciressan and
                  Adrian Mihai Ionescu},
  title        = {Fabrication of {MEMS} Resonators in Thin {SOI}},
  journal      = {CoRR},
  volume       = {abs/0802.3040},
  year         = {2008},
  url          = {http://arxiv.org/abs/0802.3040},
  eprinttype    = {arXiv},
  eprint       = {0802.3040},
  timestamp    = {Mon, 13 Aug 2018 16:48:57 +0200},
  biburl       = {https://dblp.org/rec/journals/corr/abs-0802-3040.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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