BibTeX record journals/cor/RietmanPL96

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@article{DBLP:journals/cor/RietmanPL96,
  author       = {Edward A. Rietman and
                  Suresh H. Patel and
                  Earl R. Lory},
  title        = {Modeling and control of a semiconductor manufacturing process with
                  an automata network: An example in plasma etch processing},
  journal      = {Comput. Oper. Res.},
  volume       = {23},
  number       = {6},
  pages        = {573--585},
  year         = {1996},
  url          = {https://doi.org/10.1016/0305-0548(95)00062-3},
  doi          = {10.1016/0305-0548(95)00062-3},
  timestamp    = {Tue, 18 Feb 2020 13:56:35 +0100},
  biburl       = {https://dblp.org/rec/journals/cor/RietmanPL96.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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