BibTeX record journals/chinaf/LuoLMW23

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@article{DBLP:journals/chinaf/LuoLMW23,
  author       = {Haowen Luo and
                  Ruihan Li and
                  Xiangshui Miao and
                  Xingsheng Wang},
  title        = {A comprehensive study of device variability of sub-5 nm nanosheet
                  transistors and interplay with quantum confinement variation},
  journal      = {Sci. China Inf. Sci.},
  volume       = {66},
  number       = {2},
  year         = {2023},
  url          = {https://doi.org/10.1007/s11432-021-3399-3},
  doi          = {10.1007/S11432-021-3399-3},
  timestamp    = {Mon, 26 Jun 2023 20:50:26 +0200},
  biburl       = {https://dblp.org/rec/journals/chinaf/LuoLMW23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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