Challenges of 22 nm and beyond CMOS technology.

Ru Huang HanMing Wu JinFeng Kang DeYuan Xiao XueLong Shi Xia An Yu Tian RunSheng Wang LiangLiang Zhang Xing Zhang Yangyuan Wang Challenges of 22 nm and beyond CMOS technology. 1491-1533 2009 52 Science in China Series F: Information Sciences 9 http://dx.doi.org/10.1007/s11432-009-0167-9 db/journals/chinaf/chinaf52.html#HuangWKXSATWZZW09