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@article{DBLP:journals/chinaf/CaiZHSW08,
author = {Yici Cai and
Qiang Zhou and
Xianlong Hong and
Rui Shi and
Yang Wang},
title = {Application of optical proximity correction technology},
journal = {Science in China Series F: Information Sciences},
volume = {51},
number = {2},
year = {2008},
pages = {213-224},
ee = {http://dx.doi.org/10.1007/s11432-008-0006-4},
bibsource = {DBLP, http://dblp.uni-trier.de}
}
Copyright © 2008-05-26 by Michael Ley (ley@uni-trier.de)