Richard D. Braatz Richard C. Alkire Edmund G. Seebauer Timothy O. Drews Effendi Rusli Mohan Karulkar Feng Xue Yan Qin Michael Y. L. Jung Rudiyanto Gunawan A multiscale systems approach to microelectronic processes. 1643-1656 2006 30 Computers & Chemical Engineering 10-12 http://dx.doi.org/10.1016/j.compchemeng.2006.05.022 db/journals/cce/cce30.html#BraatzASDRKXQJG06