![](https://dblp.uni-trier.de/img/logo.ua.320x120.png)
![](https://dblp.uni-trier.de/img/dropdown.dark.16x16.png)
![](https://dblp.uni-trier.de/img/peace.dark.16x16.png)
Остановите войну!
for scientists:
![search dblp search dblp](https://dblp.uni-trier.de/img/search.dark.16x16.png)
![search dblp](https://dblp.uni-trier.de/img/search.dark.16x16.png)
default search action
BibTeX record journals/aei/XuQHSLZ24
@article{DBLP:journals/aei/XuQHSLZ24, author = {Hongwei Xu and Wei Qin and Jinhua Hu and Yan{-}Ning Sun and Youlong Lv and Jie Zhang}, title = {A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication}, journal = {Adv. Eng. Informatics}, volume = {59}, pages = {102272}, year = {2024}, url = {https://doi.org/10.1016/j.aei.2023.102272}, doi = {10.1016/J.AEI.2023.102272}, timestamp = {Fri, 29 Mar 2024 23:01:25 +0100}, biburl = {https://dblp.org/rec/journals/aei/XuQHSLZ24.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
![](https://dblp.uni-trier.de/img/cog.dark.24x24.png)
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.