BibTeX record journals/access/YoonLLJYKB19

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@article{DBLP:journals/access/YoonLLJYKB19,
  author       = {Jun{-}Sik Yoon and
                  Seunghwan Lee and
                  Junjong Lee and
                  Jinsu Jeong and
                  Hyeok Yun and
                  Bohyeon Kang and
                  Rock{-}Hyun Baek},
  title        = {Source/Drain Patterning FinFETs as Solution for Physical Area Scaling
                  Toward 5-nm Node},
  journal      = {{IEEE} Access},
  volume       = {7},
  pages        = {172290--172295},
  year         = {2019},
  url          = {https://doi.org/10.1109/ACCESS.2019.2956503},
  doi          = {10.1109/ACCESS.2019.2956503},
  timestamp    = {Thu, 19 Dec 2019 09:25:35 +0100},
  biburl       = {https://dblp.org/rec/journals/access/YoonLLJYKB19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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