BibTeX record journals/access/YoonJLLLLB22

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@article{DBLP:journals/access/YoonJLLLLB22,
  author       = {Jun{-}Sik Yoon and
                  Jinsu Jeong and
                  Seunghwan Lee and
                  Junjong Lee and
                  Sanguk Lee and
                  Jaewan Lim and
                  Rock{-}Hyun Baek},
  title        = {{DC} Performance Variations by Grain Boundary in Source/Drain Epitaxy
                  of Sub-3-nm Nanosheet Field-Effect Transistors},
  journal      = {{IEEE} Access},
  volume       = {10},
  pages        = {22032--22037},
  year         = {2022},
  url          = {https://doi.org/10.1109/ACCESS.2022.3154049},
  doi          = {10.1109/ACCESS.2022.3154049},
  timestamp    = {Fri, 01 Apr 2022 11:23:25 +0200},
  biburl       = {https://dblp.org/rec/journals/access/YoonJLLLLB22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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