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BibTeX record journals/access/TinTYKTLTTP21
@article{DBLP:journals/access/TinTYKTLTTP21, author = {Tze Chiang Tin and Saw Chin Tan and Hing Yong and Jimmy Ook Hyun Kim and Eric Ken Yong Teo and Ching Kwang Lee and Peter Than and Angela Pei San Tan and Siew Chee Phang}, title = {A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective}, journal = {{IEEE} Access}, volume = {9}, pages = {65418--65439}, year = {2021}, url = {https://doi.org/10.1109/ACCESS.2021.3076193}, doi = {10.1109/ACCESS.2021.3076193}, timestamp = {Sun, 16 May 2021 00:12:38 +0200}, biburl = {https://dblp.org/rec/journals/access/TinTYKTLTTP21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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