BibTeX record journals/access/TinTYKTLTTP21

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@article{DBLP:journals/access/TinTYKTLTTP21,
  author       = {Tze Chiang Tin and
                  Saw Chin Tan and
                  Hing Yong and
                  Jimmy Ook Hyun Kim and
                  Eric Ken Yong Teo and
                  Ching Kwang Lee and
                  Peter Than and
                  Angela Pei San Tan and
                  Siew Chee Phang},
  title        = {A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing:
                  Proposal, Challenges and Future Perspective},
  journal      = {{IEEE} Access},
  volume       = {9},
  pages        = {65418--65439},
  year         = {2021},
  url          = {https://doi.org/10.1109/ACCESS.2021.3076193},
  doi          = {10.1109/ACCESS.2021.3076193},
  timestamp    = {Sun, 16 May 2021 00:12:38 +0200},
  biburl       = {https://dblp.org/rec/journals/access/TinTYKTLTTP21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}