BibTeX record journals/access/LieHWCK17

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@article{DBLP:journals/access/LieHWCK17,
  author       = {Frederick Lie and
                  Chao{-}Yi Huang and
                  Chun{-}Sheng Wu and
                  Kao{-}Tun Chen and
                  Hung{-}Fei Kuo},
  title        = {Demonstration of ACO-Based Freeform Source for ArF Laser Immersion
                  Lithography System},
  journal      = {{IEEE} Access},
  volume       = {5},
  pages        = {6421--6428},
  year         = {2017},
  url          = {https://doi.org/10.1109/ACCESS.2017.2694854},
  doi          = {10.1109/ACCESS.2017.2694854},
  timestamp    = {Wed, 04 Jul 2018 13:22:15 +0200},
  biburl       = {https://dblp.org/rec/journals/access/LieHWCK17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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