BibTeX record journals/access/KuramochiKTMK24

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@article{DBLP:journals/access/KuramochiKTMK24,
  author       = {Masaki Kuramochi and
                  Yukihide Kohira and
                  Hiroyoshi Tanabe and
                  Tetsuaki Matsunawa and
                  Chikaaki Kodama},
  title        = {Development of a Lithography Simulation Tool Set in Various Optical
                  Conditions for Source Mask Optimization},
  journal      = {{IEEE} Access},
  volume       = {12},
  pages        = {58490--58501},
  year         = {2024},
  url          = {https://doi.org/10.1109/ACCESS.2024.3390936},
  doi          = {10.1109/ACCESS.2024.3390936},
  timestamp    = {Fri, 17 May 2024 21:40:02 +0200},
  biburl       = {https://dblp.org/rec/journals/access/KuramochiKTMK24.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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