BibTeX record journals/access/JeongYB21

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@article{DBLP:journals/access/JeongYB21,
  author       = {Jinsu Jeong and
                  Jun{-}Sik Yoon and
                  Rock{-}Hyun Baek},
  title        = {Analysis of TSV-Induced Mechanical Stress and Electrical Noise Coupling
                  in Sub 5-nm Node Nanosheet FETs for Heterogeneous 3D-ICs},
  journal      = {{IEEE} Access},
  volume       = {9},
  pages        = {16728--16735},
  year         = {2021},
  url          = {https://doi.org/10.1109/ACCESS.2021.3053572},
  doi          = {10.1109/ACCESS.2021.3053572},
  timestamp    = {Thu, 11 Feb 2021 11:53:15 +0100},
  biburl       = {https://dblp.org/rec/journals/access/JeongYB21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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