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BibTeX record journals/access/BaikKKJJKK20
@article{DBLP:journals/access/BaikKKJJKK20, author = {Seunghun Baik and Dong{-}Jae Kwon and Hongki Kang and Jae Eun Jang and Jaewon Jang and Y. S. Kim and Hyuk{-}Jun Kwon}, title = {Conformal and Ultra Shallow Junction Formation Achieved Using a Pulsed-Laser Annealing Process Integrated With a Modified Plasma Assisted Doping Method}, journal = {{IEEE} Access}, volume = {8}, pages = {172166--172174}, year = {2020}, url = {https://doi.org/10.1109/ACCESS.2020.3024636}, doi = {10.1109/ACCESS.2020.3024636}, timestamp = {Thu, 14 Oct 2021 09:02:10 +0200}, biburl = {https://dblp.org/rec/journals/access/BaikKKJJKK20.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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