A simulation-based cost modeling methodology for evaluation of interbay material handling in a semiconductor wafer fab.

Shari Murray Gerald T. Mackulak John W. Fowler Theron Colvin A simulation-based cost modeling methodology for evaluation of interbay material handling in a semiconductor wafer fab. 1510-1517 2000 Winter Simulation Conference http://doi.acm.org/10.1145/510378.510599 db/conf/wsc/wsc2000.html#MurrayMFC00