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BibTeX record conf/wsc/Morrison11
@inproceedings{DBLP:conf/wsc/Morrison11, author = {James R. Morrison}, editor = {S. Jain and Roy R. Creasey Jr. and Jan Himmelspach and K. Preston White and Michael C. Fu}, title = {On the fidelity of the ax+b equipment model for clustered photolithography scanners in fab-level simulation}, booktitle = {Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011}, pages = {2034--2044}, publisher = {{IEEE}}, year = {2011}, url = {https://doi.org/10.1109/WSC.2011.6147916}, doi = {10.1109/WSC.2011.6147916}, timestamp = {Thu, 10 Jun 2021 22:18:14 +0200}, biburl = {https://dblp.org/rec/conf/wsc/Morrison11.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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