Implementation of response surface methodology using variance reduction techniques in semiconductor manufacturing.

Charles D. McAllister Bertan Altuntas Matthew Frank Juergen Potoradi Implementation of response surface methodology using variance reduction techniques in semiconductor manufacturing. 1225-1230 2001 Winter Simulation Conference http://doi.acm.org/10.1145/564124.564301 db/conf/wsc/wsc2001.html#McAllisterAFP01