BibTeX record conf/wsc/0001EFMW21

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@inproceedings{DBLP:conf/wsc/0001EFMW21,
  author       = {Chen{-}Fu Chien and
                  Hans Ehm and
                  John W. Fowler and
                  Lars M{\"{o}}nch and
                  Cheng{-}Hung Wu},
  title        = {Production-Level Artificial Intelligence Applications in Semiconductor
                  Manufacturing},
  booktitle    = {Winter Simulation Conference, {WSC} 2021, Phoenix, AZ, USA, December
                  12-15, 2021},
  pages        = {1--8},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/WSC52266.2021.9715399},
  doi          = {10.1109/WSC52266.2021.9715399},
  timestamp    = {Sun, 06 Oct 2024 21:16:59 +0200},
  biburl       = {https://dblp.org/rec/conf/wsc/0001EFMW21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}