Benoît Charlot Salvador Mir Fabien Parrain Bernard Courtois Electrically Induced Stimuli For MEMS Self-Test. 210-217 2001 conf/vts/2001 VTS http://csdl.computer.org/comp/proceedings/vts/2001/1122/00/11220210abs.htm db/conf/vts/vts2001.html#CharlotMPC01