BibTeX record conf/vlsit/XinZCDWGSZZLHDS22

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@inproceedings{DBLP:conf/vlsit/XinZCDWGSZZLHDS22,
  author       = {Tianjiao Xin and
                  Yonghui Zheng and
                  Yan Cheng and
                  Kai Du and
                  Yiwei Wang and
                  Zhaomeng Gao and
                  Diqing Su and
                  Yunzhe Zheng and
                  Qilan Zhong and
                  Cheng Liu and
                  Rong Huang and
                  Chungang Duan and
                  Sannian Song and
                  Zhitang Song and
                  Hangbing Lyu},
  title        = {Atomic visualization of the emergence of orthorhombic phase in Hf0.5Zr0.5O2
                  ferroelectric film with in-situ rapid thermal annealing},
  booktitle    = {{IEEE} Symposium on {VLSI} Technology and Circuits {(VLSI} Technology
                  and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022},
  pages        = {343--344},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830185},
  doi          = {10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830185},
  timestamp    = {Sat, 30 Sep 2023 09:58:23 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsit/XinZCDWGSZZLHDS22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}