BibTeX record conf/vlsit/VandoorenPFLARS22

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@inproceedings{DBLP:conf/vlsit/VandoorenPFLARS22,
  author       = {A. Vandooren and
                  N. Parihar and
                  Jacopo Franco and
                  Roger Loo and
                  Hiroaki Arimura and
                  R. Rodriguez and
                  F. Sebaai and
                  S. Iacovo and
                  Kevin Vandersmissen and
                  W. Li and
                  G. Mannaert and
                  D. Radisic and
                  E. Rosseel and
                  Andriy Hikavyy and
                  Anne Jourdain and
                  O. Mourey and
                  G. Gaudin and
                  Shay Reboh and
                  L. Le Van{-}Jodin and
                  Guillaume Besnard and
                  C. Roda Neve and
                  Bich{-}Yen Nguyen and
                  Iuliana P. Radu and
                  E. Dentoni Litta and
                  N. Horiguchi},
  title        = {Demonstration of 3D sequential {FD-SOI} on {CMOS} FinFET stacking
                  featuring low temperature Si layer transfer and top tier device fabrication
                  with tier interconnections},
  booktitle    = {{IEEE} Symposium on {VLSI} Technology and Circuits {(VLSI} Technology
                  and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022},
  pages        = {330--331},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830400},
  doi          = {10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830400},
  timestamp    = {Mon, 08 Jul 2024 08:23:15 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsit/VandoorenPFLARS22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}