BibTeX record conf/vlsit/LiaoASZLNWSY22

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@inproceedings{DBLP:conf/vlsit/LiaoASZLNWSY22,
  author       = {Pai{-}Ying Liao and
                  Sami Alajlouni and
                  Mengwei Si and
                  Zhuocheng Zhang and
                  Zehao Lin and
                  Jinhyun Noh and
                  Calista Wilk and
                  Ali Shakouri and
                  Peide D. Ye},
  title        = {Thermal Studies of BEOL-compatible Top-Gated Atomically Thin {ALD}
                  In2O3 FETs},
  booktitle    = {{IEEE} Symposium on {VLSI} Technology and Circuits {(VLSI} Technology
                  and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022},
  pages        = {322--323},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830279},
  doi          = {10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830279},
  timestamp    = {Thu, 04 Aug 2022 11:27:04 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsit/LiaoASZLNWSY22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}