BibTeX record conf/vlsit/KobinataFSMHAIH22

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@inproceedings{DBLP:conf/vlsit/KobinataFSMHAIH22,
  author       = {Kyosuke Kobinata and
                  Tatsuya Funaki and
                  Yoshiaki Satake and
                  Hitoshi Matsuno and
                  Seiji Hidaka and
                  Shunsuke Abe and
                  Hiroyuki Ito and
                  Chih{-}Cheng Hsiao and
                  Sheng Yi Li and
                  Young{-}Suk Kim and
                  Takayuki Ohba},
  title        = {Low-ESL ({\textless}1 pH @ 8.5 GHz) Multi-Terminal Si Capacitor Embedded
                  in 3D Functional Interposer for Power Delivery Network},
  booktitle    = {{IEEE} Symposium on {VLSI} Technology and Circuits {(VLSI} Technology
                  and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022},
  pages        = {385--386},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830411},
  doi          = {10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830411},
  timestamp    = {Thu, 04 Aug 2022 11:27:04 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsit/KobinataFSMHAIH22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}