BibTeX record conf/vlsit/ArimuraBFOVCCKS23

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@inproceedings{DBLP:conf/vlsit/ArimuraBFOVCCKS23,
  author       = {Hiroaki Arimura and
                  S. Brus and
                  Jacopo Franco and
                  Y. Oniki and
                  A. Vandooren and
                  T. Conard and
                  B. T. Chan and
                  B. Kannan and
                  M. Samiee and
                  W. Li and
                  P. Deminskyi and
                  E. Shero and
                  J. Bakke and
                  N. Jourdan and
                  G. Alessio Verni and
                  J. W. Maes and
                  M. Givens and
                  Lars{-}{\AA}ke Ragnarsson and
                  J{\'{e}}r{\^{o}}me Mitard and
                  E. Dentoni Litta and
                  N. Horiguchi},
  title        = {Molybdenum Nitride as a Scalable and Thermally Stable pWFM for {CFET}},
  booktitle    = {2023 {IEEE} Symposium on {VLSI} Technology and Circuits {(VLSI} Technology
                  and Circuits), Kyoto, Japan, June 11-16, 2023},
  pages        = {1--2},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185430},
  doi          = {10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185430},
  timestamp    = {Fri, 28 Jul 2023 11:11:24 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsit/ArimuraBFOVCCKS23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}