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BibTeX record conf/vlsi/YiLY03
@inproceedings{DBLP:conf/vlsi/YiLY03, author = {Jae{-}Young Yi and Yong{-}Hui Lee and Cheon{-}Hee Yi}, editor = {Hamid R. Arabnia and Laurence Tianruo Yang}, title = {{PEDE} (Plasma Edge Damage Effect) Curing by Various Heat Treatment}, booktitle = {Proceedings of the International Conference on VLSI, {VLSI} '03, June 23 - 26, 2003, Las Vegas, Nevada, {USA}}, pages = {356--360}, publisher = {{CSREA} Press}, year = {2003}, timestamp = {Fri, 17 Oct 2003 11:18:22 +0200}, biburl = {https://dblp.org/rec/conf/vlsi/YiLY03.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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