SanchezP04'

BibTeX

@inproceedings{DBLP:conf/smc/SanchezP04,
  author    = {Ubaldo Aleriano Sanchez and
               Tilo Pfeifer},
  title     = {Optical metrology aimed for process quality-control-loops
               (QCL) in production-modules for micro-technology},
  booktitle = {SMC (6)},
  year      = {2004},
  pages     = {5417-5422},
  ee        = {http://dx.doi.org/10.1109/ICSMC.2004.1401055},
  crossref  = {DBLP:conf/smc/2004},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}

@proceedings{DBLP:conf/smc/2004,
  title     = {Proceedings of the IEEE International Conference on Systems,
               Man {\&} Cybernetics: The Hague, Netherlands, 10-13 October
               2004},
  booktitle = {SMC},
  publisher = {IEEE},
  year      = {2004},
  isbn      = {0-7803-8566-7},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}