BibTeX record conf/sice/UetaKSSC20

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@inproceedings{DBLP:conf/sice/UetaKSSC20,
  author       = {Shiori Ueta and
                  Toru Kurihara and
                  Yuta Saibara and
                  Hideyuki Sato and
                  Pao{-}Hua Chu},
  title        = {Detection of dislocation-free state in Dash-necking process of Si
                  crystal growth furnace using the Czochralski Method},
  booktitle    = {59th Annual Conference of the Society of Instrument and Control Engineers
                  of Japan, {SICE} 2020, Chiang Mai, Thailand, September 23-26, 2020},
  pages        = {695--700},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://ieeexplore.ieee.org/document/9240449},
  timestamp    = {Tue, 10 Nov 2020 11:41:23 +0100},
  biburl       = {https://dblp.org/rec/conf/sice/UetaKSSC20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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