BibTeX record conf/sbcci/WarnekeP00

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@inproceedings{DBLP:conf/sbcci/WarnekeP00,
  author       = {Brett Warneke and
                  Kristofer S. J. Pister},
  title        = {An Integrated Circuit for the in Situ Characterization of {CMOS} Best-Process
                  Micromachining},
  booktitle    = {Proceedings of the 13th Annual Symposium on Integrated Circuits and
                  Systems Design, {SBCCI} 2000, Manaus, Brazil, September 18-24, 2000},
  pages        = {333--340},
  publisher    = {{IEEE} Computer Society},
  year         = {2000},
  url          = {https://dl.acm.org/doi/10.5555/827245.827295},
  doi          = {10.5555/827245.827295},
  timestamp    = {Fri, 03 Jun 2022 10:50:13 +0200},
  biburl       = {https://dblp.org/rec/conf/sbcci/WarnekeP00.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}