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BibTeX record conf/ofc/ZhouTCLZLYL15
@inproceedings{DBLP:conf/ofc/ZhouTCLZLYL15, author = {Haifeng Zhou and Win Kay Thi and Kok Kiong Chen and Chao Li and Huijuan Zhang and Andy Eu{-}Jin Lim and Mingbin Yu and Guo{-}Qiang Lo}, title = {Road to commercialize ArF technology for Si photonics through wafer-level assessment}, booktitle = {Optical Fiber Communications Conference and Exhibition, {OFC} 2015, Los Angeles, CA, USA, March 22-26, 2015}, pages = {1--3}, publisher = {{IEEE}}, year = {2015}, url = {https://ieeexplore.ieee.org/document/7121994}, timestamp = {Mon, 09 Aug 2021 14:54:04 +0200}, biburl = {https://dblp.org/rec/conf/ofc/ZhouTCLZLYL15.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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