DBLP BibTeX Record 'conf/nems/ZhaoZL09'

@inproceedings{DBLP:conf/nems/ZhaoZL09,
  author    = {Xu Zhao and
               Xin Zhao and
               Guizhang Lu},
  title     = {State engine based validation of MEMS process sequences},
  booktitle = {NEMS},
  year      = {2009},
  pages     = {215-218},
  ee        = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068562},
  crossref  = {DBLP:conf/nems/2009},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}
@proceedings{DBLP:conf/nems/2009,
  title     = {4th IEEE International Conference on Nano/Micro Engineered
               and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China,
               January 5-8, 2009},
  booktitle = {NEMS},
  publisher = {IEEE},
  year      = {2009},
  isbn      = {978-1-4244-4629-2},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}