BibTeX record: conf/nems/ZhaoTSC09

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@inproceedings{DBLP:conf/nems/ZhaoTSC09,
  author    = {Gang Zhao and
               Yao Tian and
               Qiong Shu and
               Jing Chen},
  title     = {Evalution of bulk titanium {DRIE} Using {SU-8} as soft mask.},
  booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  year      = {2009},
  pages     = {514--517},
  crossref  = {DBLP:conf/nems/2009},
  url       = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068631},
  doi       = {10.1109/NEMS.2009.5068631},
  timestamp = {Tue, 02 Sep 2014 23:48:39 +0200},
  biburl    = {http://dblp.uni-trier.de/rec/bib/conf/nems/ZhaoTSC09},
  bibsource = {dblp computer science bibliography, http://dblp.org}
}
@proceedings{DBLP:conf/nems/2009,
  title     = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  year      = {2009},
  publisher = {{IEEE}},
  isbn      = {978-1-4244-4629-2},
  timestamp = {Tue, 02 Sep 2014 23:48:39 +0200},
  biburl    = {http://dblp.uni-trier.de/rec/bib/conf/nems/2009},
  bibsource = {dblp computer science bibliography, http://dblp.org}
}