Gang Zhao Yao Tian Qiong Shu Jing Chen Evalution of bulk titanium DRIE Using SU-8 as soft mask. 514-517 2009 NEMS http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068631 conf/nems/2009 db/conf/nems/nems2009.html#ZhaoTSC09