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BibTeX record conf/nems/ZhaoLYL13
@inproceedings{DBLP:conf/nems/ZhaoLYL13, author = {Chenxu Zhao and Mengwei Li and Ming Yin and Zewen Liu}, title = {Micro-Raman spectroscopy analysis of residual stress in polysilicon {MEMS} resonators}, booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013}, pages = {570--573}, publisher = {{IEEE}}, year = {2013}, url = {https://doi.org/10.1109/NEMS.2013.6559795}, doi = {10.1109/NEMS.2013.6559795}, timestamp = {Mon, 08 Mar 2021 08:20:37 +0100}, biburl = {https://dblp.org/rec/conf/nems/ZhaoLYL13.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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