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BibTeX record conf/nems/ZhaoCXLN10
@inproceedings{DBLP:conf/nems/ZhaoCXLN10, author = {Min Zhao and Baoqin Chen and Changqing Xie and Ming Liu and Jiebing Nie}, title = {Study of process of {HSQ} in electron beam lithography}, booktitle = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010}, pages = {1021--1024}, publisher = {{IEEE}}, year = {2010}, url = {https://doi.org/10.1109/NEMS.2010.5592584}, doi = {10.1109/NEMS.2010.5592584}, timestamp = {Sat, 19 Oct 2019 20:20:23 +0200}, biburl = {https://dblp.org/rec/conf/nems/ZhaoCXLN10.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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