BibTeX record conf/nems/YuLY11

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@inproceedings{DBLP:conf/nems/YuLY11,
  author       = {Ting Yu and
                  Xingqiang Lu and
                  Fengqi Yu},
  title        = {Dual-bottom-electrode {CMUT} based on standard {CMOS} process},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {21--24},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017285},
  doi          = {10.1109/NEMS.2011.6017285},
  timestamp    = {Tue, 12 Apr 2022 13:28:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YuLY11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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