BibTeX record conf/nems/YanL12

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@inproceedings{DBLP:conf/nems/YanL12,
  author       = {Jhih{-}Nan Yan and
                  Yung{-}Chun Lee},
  title        = {Fabrication of metal embedded photo-mask for sub-micrometer scaled
                  photolithography and patterning sapphire substrate},
  booktitle    = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages        = {36--39},
  publisher    = {{IEEE}},
  year         = {2012},
  url          = {https://doi.org/10.1109/NEMS.2012.6196717},
  doi          = {10.1109/NEMS.2012.6196717},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YanL12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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