BibTeX record conf/nems/XueTLO21

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@inproceedings{DBLP:conf/nems/XueTLO21,
  author       = {Gaopeng Xue and
                  Masaya Toda and
                  Xinghui Li and
                  Takahito Ono},
  title        = {Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements
                  and Low Crosstalk},
  booktitle    = {16th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021},
  pages        = {43--46},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/NEMS51815.2021.9451392},
  doi          = {10.1109/NEMS51815.2021.9451392},
  timestamp    = {Sun, 02 Oct 2022 16:12:56 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XueTLO21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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