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BibTeX record conf/nems/XueTLO21
@inproceedings{DBLP:conf/nems/XueTLO21, author = {Gaopeng Xue and Masaya Toda and Xinghui Li and Takahito Ono}, title = {Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk}, booktitle = {16th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021}, pages = {43--46}, publisher = {{IEEE}}, year = {2021}, url = {https://doi.org/10.1109/NEMS51815.2021.9451392}, doi = {10.1109/NEMS51815.2021.9451392}, timestamp = {Sun, 02 Oct 2022 16:12:56 +0200}, biburl = {https://dblp.org/rec/conf/nems/XueTLO21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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