BibTeX record conf/nems/XuZDSY13

download as .bib file

@inproceedings{DBLP:conf/nems/XuZDSY13,
  author       = {Huiming Xu and
                  Hong Zhang and
                  Zhiqiang Deng and
                  Haisheng San and
                  Yuxi Yu},
  title        = {Fabrication of silicon piezoresistive pressure sensor using a reliable
                  wet etching process},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {424--427},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559763},
  doi          = {10.1109/NEMS.2013.6559763},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XuZDSY13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.