BibTeX record conf/nems/XuZCSZH16

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@inproceedings{DBLP:conf/nems/XuZCSZH16,
  author       = {Kaisi Xu and
                  Ningli Zhu and
                  Shan Cao and
                  Weiguo Su and
                  Wei Zhang and
                  Yilong Hao},
  title        = {Design and simulation of {MEMS} thermal and vibration isolator based
                  on {PDMS} beam arrays},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {213--216},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758235},
  doi          = {10.1109/NEMS.2016.7758235},
  timestamp    = {Mon, 09 Aug 2021 14:54:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XuZCSZH16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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