BibTeX record conf/nems/XuDLWW17

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@inproceedings{DBLP:conf/nems/XuDLWW17,
  author       = {Han Xu and
                  Wangzhi Dai and
                  Yaoping Liu and
                  Wengang Wu and
                  Wei Wang},
  title        = {An annealing process for mechanical strength improvement of Parylene
                  micropore-arrayed membrane},
  booktitle    = {12th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
                  2017},
  pages        = {665--668},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/NEMS.2017.8017109},
  doi          = {10.1109/NEMS.2017.8017109},
  timestamp    = {Wed, 08 Jan 2020 17:31:08 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/XuDLWW17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}