BibTeX record conf/nems/XinPPMF16

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@inproceedings{DBLP:conf/nems/XinPPMF16,
  author       = {Yu Xin and
                  Gregory Pandraud and
                  Lukasz S. Pakula and
                  Bruno Morana and
                  Paddy J. French},
  title        = {Combination of {LPCVD} and {PECVD} SiC in fabricating evanescent waveguides},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {549--552},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758311},
  doi          = {10.1109/NEMS.2016.7758311},
  timestamp    = {Thu, 23 Sep 2021 11:47:58 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XinPPMF16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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