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BibTeX record conf/nems/XieSY13
@inproceedings{DBLP:conf/nems/XieSY13, author = {Jianbing Xie and Meng Song and Weizheng Yuan}, title = {A high sensitivity micromachined accelerometer with an enhanced inertial mass {SOI} {MEMS} process}, booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013}, pages = {336--339}, publisher = {{IEEE}}, year = {2013}, url = {https://doi.org/10.1109/NEMS.2013.6559745}, doi = {10.1109/NEMS.2013.6559745}, timestamp = {Wed, 16 Oct 2019 14:14:49 +0200}, biburl = {https://dblp.org/rec/conf/nems/XieSY13.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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