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BibTeX record conf/nems/WuFFKLYJ21
@inproceedings{DBLP:conf/nems/WuFFKLYJ21, author = {Chen Wu and Xudong Fang and Zhihong Feng and Qiang Kang and Yuanjie Lv and Yuefei Yan and Zhuangde Jiang}, title = {Ohmic Contact Characteristics of Silicon Carbide-based {MEMS} Devices}, booktitle = {16th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021}, pages = {334--338}, publisher = {{IEEE}}, year = {2021}, url = {https://doi.org/10.1109/NEMS51815.2021.9451535}, doi = {10.1109/NEMS51815.2021.9451535}, timestamp = {Mon, 28 Jun 2021 16:07:08 +0200}, biburl = {https://dblp.org/rec/conf/nems/WuFFKLYJ21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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