BibTeX record conf/nems/WeiZH09

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@inproceedings{DBLP:conf/nems/WeiZH09,
  author       = {Shuhua Wei and
                  Jinzhao Zhang and
                  Li Han},
  title        = {Design and implementation of software system of E-beam lithography
                  based on {SEM}},
  booktitle    = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  pages        = {547--550},
  publisher    = {{IEEE} Computer Society},
  year         = {2009},
  url          = {https://doi.org/10.1109/NEMS.2009.5068639},
  doi          = {10.1109/NEMS.2009.5068639},
  timestamp    = {Thu, 23 Mar 2023 23:58:03 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WeiZH09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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