BibTeX record conf/nems/WeiMYY10

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@inproceedings{DBLP:conf/nems/WeiMYY10,
  author       = {Yumin Wei and
                  Xu Mao and
                  Zhenchuan Yang and
                  Guizhen Yan},
  title        = {A single mask dry releasing process for making high aspect ratio soimemsdevices},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {1040--1043},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592579},
  doi          = {10.1109/NEMS.2010.5592579},
  timestamp    = {Wed, 10 May 2023 21:51:51 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WeiMYY10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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