BibTeX record conf/nems/WangZLS09

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@inproceedings{DBLP:conf/nems/WangZLS09,
  author       = {Lingyun Wang and
                  Yibo Zeng and
                  Wenwang Li and
                  Daoheng Sun},
  title        = {Etch-back in {DDSOG} process by ultrasonic agitation and application
                  to tunneling gyroscope fabrication},
  booktitle    = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  pages        = {156--159},
  publisher    = {{IEEE} Computer Society},
  year         = {2009},
  url          = {https://doi.org/10.1109/NEMS.2009.5068548},
  doi          = {10.1109/NEMS.2009.5068548},
  timestamp    = {Thu, 23 Mar 2023 23:58:03 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WangZLS09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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