BibTeX record conf/nems/WangYCSF19

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@inproceedings{DBLP:conf/nems/WangYCSF19,
  author       = {Mingyu Wang and
                  Zhan Yang and
                  Tao Chen and
                  Lining Sun and
                  Toshio Fukuda},
  title        = {Motion control of nanomanipulation platform based on feedforward compensation
                  inside {SEM}},
  booktitle    = {14th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages        = {370--374},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/NEMS.2019.8915647},
  doi          = {10.1109/NEMS.2019.8915647},
  timestamp    = {Thu, 22 Oct 2020 17:01:29 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangYCSF19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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