BibTeX record conf/nems/WangWMD21

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@inproceedings{DBLP:conf/nems/WangWMD21,
  author       = {Shihang Wang and
                  Yancheng Wang and
                  Deqing Mei and
                  Songqiao Dai},
  title        = {Development of an Annular-Shaped Bernoulli Gripper for Contactless
                  Gripping of Large-Size Silicon Wafer},
  booktitle    = {16th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021},
  pages        = {1871--1876},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/NEMS51815.2021.9451393},
  doi          = {10.1109/NEMS51815.2021.9451393},
  timestamp    = {Sat, 30 Sep 2023 09:53:54 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangWMD21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}