BibTeX record conf/nems/WangTFLSW12

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@inproceedings{DBLP:conf/nems/WangTFLSW12,
  author       = {Y. F. Wang and
                  Y. Tian and
                  K. J. Feng and
                  C. Li and
                  D. D. She and
                  W. G. Wu},
  title        = {Vertical deposition of nanospheres on the open sidewalls of silicon
                  pillars},
  booktitle    = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages        = {437--440},
  publisher    = {{IEEE}},
  year         = {2012},
  url          = {https://doi.org/10.1109/NEMS.2012.6196812},
  doi          = {10.1109/NEMS.2012.6196812},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangTFLSW12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}