BibTeX record conf/nems/WangSKJSGE13

• > Home > conf/nems/WangSKJSGE13

@inproceedings{DBLP:conf/nems/WangSKJSGE13,
  author       = {Li Wang and
                  H. Schift and
                  P. M. Kristiansen and
                  Konstantins Jefimovs and
                  H. H. Solak and
                  J. Gobrecht and
                  Yasin Ekinci},
  title        = {Bilayer wire-grid polarizers for {DUV} to {IR} fabricated using {EUV}
                  interference and nanoimprint lithography},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {1232--1235},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559941},
  doi          = {10.1109/NEMS.2013.6559941},
  timestamp    = {Thu, 05 Nov 2020 17:00:35 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WangSKJSGE13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}