BibTeX record conf/nems/UmAFKTM10

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@inproceedings{DBLP:conf/nems/UmAFKTM10,
  author       = {Dugan Um and
                  Bahram Asiabanpour and
                  David Foor and
                  Mathew Kurtz and
                  Mary Tellers and
                  Todd McGregor},
  title        = {Micro scale silicon dioxide gear fabrication by bulk micromachining
                  process},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {860--864},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592170},
  doi          = {10.1109/NEMS.2010.5592170},
  timestamp    = {Tue, 13 Feb 2024 20:46:01 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/UmAFKTM10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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